A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer

Micro-electromechanical system (MEMS) accelerometers are widely used in the inertial navigation and nanosatellites field. A high-performance digital interface circuit for a high-Q MEMS micro-accelerometer is presented in this work. The mechanical noise of the MEMS accelerometer is decreased by the a...

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Detalles Bibliográficos
Autores principales: Li, Xiangyu, Hu, Jianping, Liu, Xiaowei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6316820/
https://www.ncbi.nlm.nih.gov/pubmed/30572597
http://dx.doi.org/10.3390/mi9120675

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6316820/
https://www.ncbi.nlm.nih.gov/pubmed/30572597
http://dx.doi.org/10.3390/mi9120675

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