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A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer
Micro-electromechanical system (MEMS) accelerometers are widely used in the inertial navigation and nanosatellites field. A high-performance digital interface circuit for a high-Q MEMS micro-accelerometer is presented in this work. The mechanical noise of the MEMS accelerometer is decreased by the a...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6316820/ https://www.ncbi.nlm.nih.gov/pubmed/30572597 http://dx.doi.org/10.3390/mi9120675 |