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A Miniature Resonant and Torsional Magnetometer Based on Lorentz Force

A microelectromechanical system (MEMS) torsional resonant magnetometer based on Lorentz force was investigated, consisting of torsional structures, torsional beams, metal plates, a coil, and a glass substrate. The Lorentz force, introduced by the interaction between the current in the MEMS coil and...

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Detalles Bibliográficos
Autores principales: Wu, Lingqi, Tian, Zheng, Ren, Dahai, You, Zheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6316825/
https://www.ncbi.nlm.nih.gov/pubmed/30562964
http://dx.doi.org/10.3390/mi9120666