Structure and Electron Mobility of ScN Films Grown on α-Al(2)O(3)(1 [Formula: see text] 02) Substrates

Scandium nitride (ScN) films were grown on α-Al(2)O(3)([Formula: see text]) substrates using the molecular beam epitaxy method, and the heteroepitaxial growth of ScN on α-Al(2)O(3)([Formula: see text]) and their electric properties were studied. Epitaxial ScN films with an orientation relationship (...

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Detalles Bibliográficos
Autores principales: Ohgaki, Takeshi, Sakaguchi, Isao, Ohashi, Naoki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6317162/
https://www.ncbi.nlm.nih.gov/pubmed/30513954
http://dx.doi.org/10.3390/ma11122449

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6317162/
https://www.ncbi.nlm.nih.gov/pubmed/30513954
http://dx.doi.org/10.3390/ma11122449

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