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Structure and Electron Mobility of ScN Films Grown on α-Al(2)O(3)(1 [Formula: see text] 02) Substrates
Scandium nitride (ScN) films were grown on α-Al(2)O(3)([Formula: see text]) substrates using the molecular beam epitaxy method, and the heteroepitaxial growth of ScN on α-Al(2)O(3)([Formula: see text]) and their electric properties were studied. Epitaxial ScN films with an orientation relationship (...
Autores principales: | Ohgaki, Takeshi, Sakaguchi, Isao, Ohashi, Naoki |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6317162/ https://www.ncbi.nlm.nih.gov/pubmed/30513954 http://dx.doi.org/10.3390/ma11122449 |
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