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Particle atomic layer deposition

The functionalization of fine primary particles by atomic layer deposition (particle ALD) provides for nearly perfect nanothick films to be deposited conformally on both external and internal particle surfaces, including nanoparticle surfaces. Film thickness is easily controlled from several angstro...

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Detalles Bibliográficos
Autor principal: Weimer, Alan W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Netherlands 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6320374/
https://www.ncbi.nlm.nih.gov/pubmed/30662321
http://dx.doi.org/10.1007/s11051-018-4442-9