Incoming Work-In-Progress Prediction in Semiconductor Fabrication Foundry Using Long Short-Term Memory

Preventive maintenance activities require a tool to be offline for long hour in order to perform the prescribed maintenance activities. Although preventive maintenance is crucial to ensure operational reliability and efficiency of the tool, long hour of preventive maintenance activities increases th...

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Detalles Bibliográficos
Autores principales: Tin, Tze Chiang, Chiew, Kang Leng, Phang, Siew Chee, Sze, San Nah, Tan, Pei San
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Hindawi 2019
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6334351/
https://www.ncbi.nlm.nih.gov/pubmed/30719036
http://dx.doi.org/10.1155/2019/8729367

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6334351/
https://www.ncbi.nlm.nih.gov/pubmed/30719036
http://dx.doi.org/10.1155/2019/8729367

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