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Incoming Work-In-Progress Prediction in Semiconductor Fabrication Foundry Using Long Short-Term Memory
Preventive maintenance activities require a tool to be offline for long hour in order to perform the prescribed maintenance activities. Although preventive maintenance is crucial to ensure operational reliability and efficiency of the tool, long hour of preventive maintenance activities increases th...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Hindawi
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6334351/ https://www.ncbi.nlm.nih.gov/pubmed/30719036 http://dx.doi.org/10.1155/2019/8729367 |