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Nanostructure and Optical Property Investigations of SrTiO(3) Films Deposited by Magnetron Sputtering
Strontium titanate thin films were deposited on a silicon substrate by radio-frequency magnetron sputtering. The structural and optical properties of these films were characterized by X-ray diffraction, high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and spectrosc...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6337090/ https://www.ncbi.nlm.nih.gov/pubmed/30609837 http://dx.doi.org/10.3390/ma12010138 |