Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon

The fabrication of micro-holes in silicon substrates that have a proper taper, higher depth-to-diameter ratio, and better surface quality has been attracting intense interest for a long time due to its importance in the semiconductor and MEMS (Micro-Electro-Mechanical System) industry. In this paper...

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Detalles Bibliográficos
Autores principales: Zhu, Hao, Zhang, Zhaoyang, Xu, Kun, Xu, Jinlei, Zhu, Shuaijie, Wang, Anbin, Qi, Huan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6337372/
https://www.ncbi.nlm.nih.gov/pubmed/30583577
http://dx.doi.org/10.3390/ma12010041

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6337372/
https://www.ncbi.nlm.nih.gov/pubmed/30583577
http://dx.doi.org/10.3390/ma12010041

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