Minority Carrier Lifetime Measurements for Contactless Oxidation Process Characterization and Furnace Profiling

Contactless minority carrier lifetime (lifetime) measurements by means of microwave detected photoconductivity are employed for oxidation process characterization and furnace profiling. Characterization is performed on oxidized float zone substrates with high resistivity and outstanding bulk quality...

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Detalles Bibliográficos
Autores principales: Bscheid, Christian, Engst, Christian R., Eisele, Ignaz, Kutter, Christoph
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6337543/
https://www.ncbi.nlm.nih.gov/pubmed/30626066
http://dx.doi.org/10.3390/ma12010190

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6337543/
https://www.ncbi.nlm.nih.gov/pubmed/30626066
http://dx.doi.org/10.3390/ma12010190

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