Cargando…
Minority Carrier Lifetime Measurements for Contactless Oxidation Process Characterization and Furnace Profiling
Contactless minority carrier lifetime (lifetime) measurements by means of microwave detected photoconductivity are employed for oxidation process characterization and furnace profiling. Characterization is performed on oxidized float zone substrates with high resistivity and outstanding bulk quality...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6337543/ https://www.ncbi.nlm.nih.gov/pubmed/30626066 http://dx.doi.org/10.3390/ma12010190 |