Inter-digital capacitors with aerosol-deposited high-K dielectric layer for highest capacitance value in capacitive super-sensing applications

Inter-digital capacitors (IDCs) with aerosol-deposition (AD) high-k dielectric layer were compared via simulation and measurements of bare IDCs and AD IDCs at room temperature and subjected to a post-annealing process for realizing capacitive super-sensing applications. IDCs with thin AD films can p...

Descripción completa

Detalles Bibliográficos
Autores principales: Kim, Eun-Seong, Liang, Jun-Ge, Wang, Cong, Cho, Myung-Yeon, Oh, Jong-Min, Kim, Nam-Young
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6346106/
https://www.ncbi.nlm.nih.gov/pubmed/30679820
http://dx.doi.org/10.1038/s41598-018-37416-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6346106/
https://www.ncbi.nlm.nih.gov/pubmed/30679820
http://dx.doi.org/10.1038/s41598-018-37416-7

Ejemplares similares