Inter-digital capacitors with aerosol-deposited high-K dielectric layer for highest capacitance value in capacitive super-sensing applications

Inter-digital capacitors (IDCs) with aerosol-deposition (AD) high-k dielectric layer were compared via simulation and measurements of bare IDCs and AD IDCs at room temperature and subjected to a post-annealing process for realizing capacitive super-sensing applications. IDCs with thin AD films can provide higher capacitive intensity and improvements for other dielectric performances. Therefore, IDC patterns with AD high-k dielectric layers were fabricated by varying the finger widths and gap. Moreover, we analyzed the layer microstructure design patterns using simulations and experiments with AD BaTiO(3) as-deposited IDCs and IDCs subjected to annealing at 500 °C. These three different IDCs were measured using an impedance analyzer; furthermore, the AD BaTiO(3) films were evaluated using X-ray diffraction, atomic force microscopy, and traveling electron microscopy. The results for the IDCs with the AD BaTiO(3) film show the highest capacitance when compared with other thin layer capacitors, which is expected to be useful in realizing super-sensing applications in the future.