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Inter-digital capacitors with aerosol-deposited high-K dielectric layer for highest capacitance value in capacitive super-sensing applications
Inter-digital capacitors (IDCs) with aerosol-deposition (AD) high-k dielectric layer were compared via simulation and measurements of bare IDCs and AD IDCs at room temperature and subjected to a post-annealing process for realizing capacitive super-sensing applications. IDCs with thin AD films can p...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6346106/ https://www.ncbi.nlm.nih.gov/pubmed/30679820 http://dx.doi.org/10.1038/s41598-018-37416-7 |