A Study on Parametric Amplification in a Piezoelectric MEMS Device

In various applications, damping from the surrounding fluid severely degrades the performance of micro-electro-mechanical systems (MEMS). In this paper, mechanical amplification through parametric resonance was investigated in a piezoelectrically actuated MEMS to overcome the effects of damping. The...

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Detalles Bibliográficos
Autores principales: Gonzalez, Miguel, Lee, Yoonseok
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6356750/
https://www.ncbi.nlm.nih.gov/pubmed/30597955
http://dx.doi.org/10.3390/mi10010019

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6356750/
https://www.ncbi.nlm.nih.gov/pubmed/30597955
http://dx.doi.org/10.3390/mi10010019

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