Laser-writable high-k dielectric for van der Waals nanoelectronics

Similar to silicon-based semiconductor devices, van der Waals heterostructures require integration with high-k oxides. Here, we demonstrate a method to embed and pattern a multifunctional few-nanometer-thick high-k oxide within various van der Waals devices without degrading the properties of the ne...

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Detalles Bibliográficos
Autores principales: Peimyoo, N., Barnes, M. D., Mehew, J. D., De Sanctis, A., Amit, I., Escolar, J., Anastasiou, K., Rooney, A. P., Haigh, S. J., Russo, S., Craciun, M. F., Withers, F.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Association for the Advancement of Science 2019
Materias:
Research Articles
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6357741/
https://www.ncbi.nlm.nih.gov/pubmed/30746444
http://dx.doi.org/10.1126/sciadv.aau0906

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6357741/
https://www.ncbi.nlm.nih.gov/pubmed/30746444
http://dx.doi.org/10.1126/sciadv.aau0906

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