Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices †

Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power...

Descripción completa

Detalles Bibliográficos
Autores principales: Lahlalia, Ayoub, Le Neel, Olivier, Shankar, Ravi, Selberherr, Siegfried, Filipovic, Lado
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6358910/
https://www.ncbi.nlm.nih.gov/pubmed/30658488
http://dx.doi.org/10.3390/s19020374

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6358910/
https://www.ncbi.nlm.nih.gov/pubmed/30658488
http://dx.doi.org/10.3390/s19020374

Ejemplares similares