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Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices †
Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6358910/ https://www.ncbi.nlm.nih.gov/pubmed/30658488 http://dx.doi.org/10.3390/s19020374 |