Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection

This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silico...

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Detalles Bibliográficos
Autores principales: Li, Haoyong, Li, Delin, Xiong, Chaoyu, Si, Wenrong, Fu, Chenzhao, Yuan, Peng, Yu, Yiting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6359033/
https://www.ncbi.nlm.nih.gov/pubmed/30669494
http://dx.doi.org/10.3390/s19020406

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6359033/
https://www.ncbi.nlm.nih.gov/pubmed/30669494
http://dx.doi.org/10.3390/s19020406

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