Cargando…
Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silico...
Autores principales: | , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6359033/ https://www.ncbi.nlm.nih.gov/pubmed/30669494 http://dx.doi.org/10.3390/s19020406 |
_version_ | 1783392133421465600 |
---|---|
author | Li, Haoyong Li, Delin Xiong, Chaoyu Si, Wenrong Fu, Chenzhao Yuan, Peng Yu, Yiting |
author_facet | Li, Haoyong Li, Delin Xiong, Chaoyu Si, Wenrong Fu, Chenzhao Yuan, Peng Yu, Yiting |
author_sort | Li, Haoyong |
collection | PubMed |
description | This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silicon-on-insulator (SOI) wafer. The Fabry–Perot (FP) cavity length was solely determined during the manufacturing process of the diaphragm by defining a specific stepped hole on the handling layer of the SOI wafer, which made the assembly of the sensor easier. In addition, the use of cheap and commercially available components and MEMS processing technology in the development of the sensing system, limited the cost of the sensor. The experimental tests showed that the minimum detectable ultrasonic pressure was 1.5 mPa/sqrt(Hz) −0.625 mPa/sqrt(Hz) between 20 kHz and 40 kHz. As a result, this sensor has the potential to successfully detect weak ultrasonic signals. |
format | Online Article Text |
id | pubmed-6359033 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-63590332019-02-06 Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection Li, Haoyong Li, Delin Xiong, Chaoyu Si, Wenrong Fu, Chenzhao Yuan, Peng Yu, Yiting Sensors (Basel) Article This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silicon-on-insulator (SOI) wafer. The Fabry–Perot (FP) cavity length was solely determined during the manufacturing process of the diaphragm by defining a specific stepped hole on the handling layer of the SOI wafer, which made the assembly of the sensor easier. In addition, the use of cheap and commercially available components and MEMS processing technology in the development of the sensing system, limited the cost of the sensor. The experimental tests showed that the minimum detectable ultrasonic pressure was 1.5 mPa/sqrt(Hz) −0.625 mPa/sqrt(Hz) between 20 kHz and 40 kHz. As a result, this sensor has the potential to successfully detect weak ultrasonic signals. MDPI 2019-01-19 /pmc/articles/PMC6359033/ /pubmed/30669494 http://dx.doi.org/10.3390/s19020406 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Li, Haoyong Li, Delin Xiong, Chaoyu Si, Wenrong Fu, Chenzhao Yuan, Peng Yu, Yiting Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection |
title | Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection |
title_full | Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection |
title_fullStr | Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection |
title_full_unstemmed | Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection |
title_short | Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection |
title_sort | low-cost, high-performance fiber optic fabry–perot sensor for ultrasonic wave detection |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6359033/ https://www.ncbi.nlm.nih.gov/pubmed/30669494 http://dx.doi.org/10.3390/s19020406 |
work_keys_str_mv | AT lihaoyong lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection AT lidelin lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection AT xiongchaoyu lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection AT siwenrong lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection AT fuchenzhao lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection AT yuanpeng lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection AT yuyiting lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection |