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Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection

This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silico...

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Detalles Bibliográficos
Autores principales: Li, Haoyong, Li, Delin, Xiong, Chaoyu, Si, Wenrong, Fu, Chenzhao, Yuan, Peng, Yu, Yiting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6359033/
https://www.ncbi.nlm.nih.gov/pubmed/30669494
http://dx.doi.org/10.3390/s19020406
_version_ 1783392133421465600
author Li, Haoyong
Li, Delin
Xiong, Chaoyu
Si, Wenrong
Fu, Chenzhao
Yuan, Peng
Yu, Yiting
author_facet Li, Haoyong
Li, Delin
Xiong, Chaoyu
Si, Wenrong
Fu, Chenzhao
Yuan, Peng
Yu, Yiting
author_sort Li, Haoyong
collection PubMed
description This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silicon-on-insulator (SOI) wafer. The Fabry–Perot (FP) cavity length was solely determined during the manufacturing process of the diaphragm by defining a specific stepped hole on the handling layer of the SOI wafer, which made the assembly of the sensor easier. In addition, the use of cheap and commercially available components and MEMS processing technology in the development of the sensing system, limited the cost of the sensor. The experimental tests showed that the minimum detectable ultrasonic pressure was 1.5 mPa/sqrt(Hz) −0.625 mPa/sqrt(Hz) between 20 kHz and 40 kHz. As a result, this sensor has the potential to successfully detect weak ultrasonic signals.
format Online
Article
Text
id pubmed-6359033
institution National Center for Biotechnology Information
language English
publishDate 2019
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-63590332019-02-06 Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection Li, Haoyong Li, Delin Xiong, Chaoyu Si, Wenrong Fu, Chenzhao Yuan, Peng Yu, Yiting Sensors (Basel) Article This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silicon-on-insulator (SOI) wafer. The Fabry–Perot (FP) cavity length was solely determined during the manufacturing process of the diaphragm by defining a specific stepped hole on the handling layer of the SOI wafer, which made the assembly of the sensor easier. In addition, the use of cheap and commercially available components and MEMS processing technology in the development of the sensing system, limited the cost of the sensor. The experimental tests showed that the minimum detectable ultrasonic pressure was 1.5 mPa/sqrt(Hz) −0.625 mPa/sqrt(Hz) between 20 kHz and 40 kHz. As a result, this sensor has the potential to successfully detect weak ultrasonic signals. MDPI 2019-01-19 /pmc/articles/PMC6359033/ /pubmed/30669494 http://dx.doi.org/10.3390/s19020406 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Li, Haoyong
Li, Delin
Xiong, Chaoyu
Si, Wenrong
Fu, Chenzhao
Yuan, Peng
Yu, Yiting
Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
title Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
title_full Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
title_fullStr Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
title_full_unstemmed Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
title_short Low-Cost, High-Performance Fiber Optic Fabry–Perot Sensor for Ultrasonic Wave Detection
title_sort low-cost, high-performance fiber optic fabry–perot sensor for ultrasonic wave detection
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6359033/
https://www.ncbi.nlm.nih.gov/pubmed/30669494
http://dx.doi.org/10.3390/s19020406
work_keys_str_mv AT lihaoyong lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection
AT lidelin lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection
AT xiongchaoyu lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection
AT siwenrong lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection
AT fuchenzhao lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection
AT yuanpeng lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection
AT yuyiting lowcosthighperformancefiberopticfabryperotsensorforultrasonicwavedetection