Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure

Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-freque...

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Detalles Bibliográficos
Autores principales: Hasan, Mohammad H., Alsaleem, Fadi, Ramini, Abdallah
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6359633/
https://www.ncbi.nlm.nih.gov/pubmed/30669268
http://dx.doi.org/10.3390/s19020380

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6359633/
https://www.ncbi.nlm.nih.gov/pubmed/30669268
http://dx.doi.org/10.3390/s19020380

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