Cargando…

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO(2) Using Carbon Dioxide

In this work, we report the successful growth of high-quality SiO(2) films by low-temperature plasma-enhanced atomic layer deposition using an oxidant which is compatible with moisture/oxygen sensitive materials. The SiO(2) films were grown at 90 °C using CO(2) and Bis(tertiary-butylamino)silane as...

Descripción completa

Detalles Bibliográficos
Autores principales:	Zhu, Zhen, Sippola, Perttu, Ylivaara, Oili M. E., Modanese, Chiara, Di Sabatino, Marisa, Mizohata, Kenichiro, Merdes, Saoussen, Lipsanen, Harri, Savin, Hele
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2019
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6372707/ https://www.ncbi.nlm.nih.gov/pubmed/30747362 http://dx.doi.org/10.1186/s11671-019-2889-y

Ejemplares similares

Effect of Surface Wear on Corrosion Protection of Steel by CrN Coatings Sealed with Atomic Layer Deposition
por: Leppäniemi, Jarmo, et al.
Publicado: (2018)

Compositional and optical properties of SiO( x ) films and (SiO( x )/SiO( y )) junctions deposited by HFCVD
por: Vázquez-Valerdi, Diana E, et al.
Publicado: (2014)

Stepwise mechanism and H(2)O-assisted hydrolysis in atomic layer deposition of SiO(2) without a catalyst
por: Fang, Guo-Yong, et al.
Publicado: (2015)

Atomic characterization of Si nanoclusters embedded in SiO(2 )by atom probe tomography
por: Roussel, Manuel, et al.
Publicado: (2011)

Interfacial, Electrical, and Band Alignment Characteristics of HfO(2)/Ge Stacks with In Situ-Formed SiO(2) Interlayer by Plasma-Enhanced Atomic Layer Deposition
por: Cao, Yan-Qiang, et al.
Publicado: (2017)

Characterization of ultrathin InSb nanocrystals film deposited on SiO(2)/Si substrate
por: Li, Dengyue, et al.
Publicado: (2011)

Direct Synthesis of Graphene Dendrites on SiO(2)/Si Substrates by Chemical Vapor Deposition
por: Li, Yingxian, et al.
Publicado: (2020)

Atomic Force Microscopy Study of the Kinetic Roughening in Nanostructured Gold Films on SiO(2)
por: Ruffino, F, et al.
Publicado: (2009)

Nano-oxide thin films deposited via atomic layer deposition on microchannel plates
por: Yan, Baojun, et al.
Publicado: (2015)

Effect of surrounding environment on atomic structure and equilibrium shape of growing nanocrystals: gold in/on SiO(2)
por: Ruffino, F, et al.
Publicado: (2007)

Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition
por: Zhai, Chen-Hui, et al.
Publicado: (2016)

Nanocolumnar Preferentially Oriented PSZT Thin Films Deposited on Thermally Grown Silicon Dioxide
por: Sriram, S, et al.
Publicado: (2008)

The impact of thickness and thermal annealing on refractive index for aluminum oxide thin films deposited by atomic layer deposition
por: Wang, Zi-Yi, et al.
Publicado: (2015)

Iridium wire grid polarizer fabricated using atomic layer deposition
por: Weber, Thomas, et al.
Publicado: (2011)

Atomic Layer Deposition of Pt Nanoparticles for Microengine with Promoted Catalytic Motion
por: Jiang, Chi, et al.
Publicado: (2016)

Influence of argon plasma on the deposition of Al(2)O(3) film onto the PET surfaces by atomic layer deposition
por: Edy, Riyanto, et al.
Publicado: (2013)

The Influence of Hafnium Doping on Density of States in Zinc Oxide Thin-Film Transistors Deposited via Atomic Layer Deposition
por: Ding, Xingwei, et al.
Publicado: (2017)

Density Functional Theory Study of Atomic Layer Deposition of Zinc Oxide on Graphene
por: Ali, Amgad Ahmed, et al.
Publicado: (2015)

Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors
por: Ma, Qian, et al.
Publicado: (2018)

High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition
por: Cao, Weiwei, et al.
Publicado: (2019)

Surface Passivation of Silicon Using HfO(2) Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
por: Zhang, Xiao-Ying, et al.
Publicado: (2017)

Atom Diffusion and Evaporation of Free-Ended Amorphous SiO(x) Nanowires: Nanocurvature Effect and Beam-Induced Athermal Activation Effect
por: Su, Jiangbin, et al.
Publicado: (2016)

Improvement of carrier diffusion length in silicon nanowire arrays using atomic layer deposition
por: Kato, Shinya, et al.
Publicado: (2013)

Effects of doping and annealing on properties of ZnO films grown by atomic layer deposition
por: Wang, Aiji, et al.
Publicado: (2015)

Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
por: Huang, Ruomeng, et al.
Publicado: (2017)

Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays
por: Li, Hao-Hao, et al.
Publicado: (2019)

Highly Sensitive and Stable SERS Substrate Fabricated by Co-sputtering and Atomic Layer Deposition
por: Yin, Guilin, et al.
Publicado: (2019)

Effects of Rapid Thermal Annealing and Different Oxidants on the Properties of La(x)Al(y)O Nanolaminate Films Deposited by Atomic Layer Deposition
por: Fei, Chenxi, et al.
Publicado: (2017)

Effect of atomic layer deposition temperature on the performance of top-down ZnO nanowire transistors
por: Sultan, Suhana M, et al.
Publicado: (2014)

TiO(2) Nanomembranes Fabricated by Atomic Layer Deposition for Supercapacitor Electrode with Enhanced Capacitance
por: Naeem, Farah, et al.
Publicado: (2019)

Negative Differential Resistance Effect in Ru-Based RRAM Device Fabricated by Atomic Layer Deposition
por: Feng, Yulin, et al.
Publicado: (2019)

Atom-to-atom interactions for atomic layer deposition of trimethylaluminum on Ga-rich GaAs(001)-4 × 6 and As-rich GaAs(001)-2 × 4 surfaces: a synchrotron radiation photoemission study
por: Pi, Tun-Wen, et al.
Publicado: (2013)

The influence of process parameters and pulse ratio of precursors on the characteristics of La(1 − x)Al(x)O(3) films deposited by atomic layer deposition
por: Fei, Chenxi, et al.
Publicado: (2015)

Multi-Directional Growth of Aligned Carbon Nanotubes Over Catalyst Film Prepared by Atomic Layer Deposition
por: Zhou, Kai, et al.
Publicado: (2010)

The heterojunction effects of TiO(2 )nanotubes fabricated by atomic layer deposition on photocarrier transportation direction
por: Chang, Yung-Huang, et al.
Publicado: (2012)

Structural, electrical, and optical properties of Ti-doped ZnO films fabricated by atomic layer deposition
por: Ye, Zhi-Yuan, et al.
Publicado: (2013)

Optical and microstructural properties of ZnO/TiO(2) nanolaminates prepared by atomic layer deposition
por: Gu, Yu-Zhu, et al.
Publicado: (2013)

Demonstration of Logic Operations in High-Performance RRAM Crossbar Array Fabricated by Atomic Layer Deposition Technique
por: Han, Runze, et al.
Publicado: (2017)

Effects of Annealing Ambient on the Characteristics of LaAlO(3) Films Grown by Atomic Layer Deposition
por: Zhao, Lu, et al.
Publicado: (2017)

Direct Growth of Al(2)O(3) on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
por: Wu, B. B., et al.
Publicado: (2017)

Cannot write session to /tmp/vufind_sessions/sess_h3dc6ed5nb0g37f4dboqi97dov