Plastic-scale-model assembly of ultrathin film MEMS piezoresistive strain sensor with conventional vacuum-suction chip mounter

We developed a plastic-scale-model assembly of an ultrathin film piezoresistive microelectromechanical systems (MEMS) strain sensor with a conventional vacuum-suction chip mounter for the application to flexible and wearable strain sensors. A plastic-scale-model MEMS chip consists of 5-μm ultrathin...

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Detalles Bibliográficos
Autores principales: Takamatsu, Seiichi, Goto, Shintaro, Yamamoto, Michitaka, Yamashita, Takahiro, Kobayashi, Takeshi, Itoh, Toshihiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6374368/
https://www.ncbi.nlm.nih.gov/pubmed/30760831
http://dx.doi.org/10.1038/s41598-019-39364-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6374368/
https://www.ncbi.nlm.nih.gov/pubmed/30760831
http://dx.doi.org/10.1038/s41598-019-39364-2

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