Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator

Silicon Microelectromechanical Systems (MEMS) resonators have broad commercial applications for timing and inertial sensing. However, the performance of MEMS resonators is constrained by dissipation mechanisms, some of which are easily detected and well-understood, but some of which have never been...

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Detalles Bibliográficos
Autores principales: Rodriguez, Janna, Chandorkar, Saurabh A., Watson, Christopher A., Glaze, Grant M., Ahn, C. H., Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6381092/
https://www.ncbi.nlm.nih.gov/pubmed/30783192
http://dx.doi.org/10.1038/s41598-019-38847-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6381092/
https://www.ncbi.nlm.nih.gov/pubmed/30783192
http://dx.doi.org/10.1038/s41598-019-38847-6

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