Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes

A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s...

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Detalles Bibliográficos
Autores principales: Arunachalam, Shivaram, Izquierdo, Ricardo, Nabki, Frederic
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386924/
https://www.ncbi.nlm.nih.gov/pubmed/30736455
http://dx.doi.org/10.3390/s19030680

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386924/
https://www.ncbi.nlm.nih.gov/pubmed/30736455
http://dx.doi.org/10.3390/s19030680

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