Humidity Sensors with Shielding Electrode Under Interdigitated Electrode

Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to...

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Detalles Bibliográficos
Autores principales: Liu, Hong, Wang, Qi, Sheng, Wenjie, Wang, Xubo, Zhang, Kaidi, Du, Lin, Zhou, Jia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386973/
https://www.ncbi.nlm.nih.gov/pubmed/30736294
http://dx.doi.org/10.3390/s19030659

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386973/
https://www.ncbi.nlm.nih.gov/pubmed/30736294
http://dx.doi.org/10.3390/s19030659

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