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Humidity Sensors with Shielding Electrode Under Interdigitated Electrode
Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386973/ https://www.ncbi.nlm.nih.gov/pubmed/30736294 http://dx.doi.org/10.3390/s19030659 |
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author | Liu, Hong Wang, Qi Sheng, Wenjie Wang, Xubo Zhang, Kaidi Du, Lin Zhou, Jia |
author_facet | Liu, Hong Wang, Qi Sheng, Wenjie Wang, Xubo Zhang, Kaidi Du, Lin Zhou, Jia |
author_sort | Liu, Hong |
collection | PubMed |
description | Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% ± 0.0002% RH. Its response/recovery time is 20 s/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH. |
format | Online Article Text |
id | pubmed-6386973 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-63869732019-02-26 Humidity Sensors with Shielding Electrode Under Interdigitated Electrode Liu, Hong Wang, Qi Sheng, Wenjie Wang, Xubo Zhang, Kaidi Du, Lin Zhou, Jia Sensors (Basel) Article Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% ± 0.0002% RH. Its response/recovery time is 20 s/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH. MDPI 2019-02-06 /pmc/articles/PMC6386973/ /pubmed/30736294 http://dx.doi.org/10.3390/s19030659 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Liu, Hong Wang, Qi Sheng, Wenjie Wang, Xubo Zhang, Kaidi Du, Lin Zhou, Jia Humidity Sensors with Shielding Electrode Under Interdigitated Electrode |
title | Humidity Sensors with Shielding Electrode Under Interdigitated Electrode |
title_full | Humidity Sensors with Shielding Electrode Under Interdigitated Electrode |
title_fullStr | Humidity Sensors with Shielding Electrode Under Interdigitated Electrode |
title_full_unstemmed | Humidity Sensors with Shielding Electrode Under Interdigitated Electrode |
title_short | Humidity Sensors with Shielding Electrode Under Interdigitated Electrode |
title_sort | humidity sensors with shielding electrode under interdigitated electrode |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386973/ https://www.ncbi.nlm.nih.gov/pubmed/30736294 http://dx.doi.org/10.3390/s19030659 |
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