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Humidity Sensors with Shielding Electrode Under Interdigitated Electrode

Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to...

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Detalles Bibliográficos
Autores principales:	Liu, Hong, Wang, Qi, Sheng, Wenjie, Wang, Xubo, Zhang, Kaidi, Du, Lin, Zhou, Jia
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386973/ https://www.ncbi.nlm.nih.gov/pubmed/30736294 http://dx.doi.org/10.3390/s19030659

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