In-Situ Temperature Measurement on CMOS Integrated Micro-Hotplates for Gas Sensing Devices

Metal oxide gas sensors generally need to be operated at elevated temperatures, up to and above 400 °C. Following the need for miniaturization of gas sensors and implementation into smart devices such as smartphones or wireless sensor nodes, recently complementary metal-oxide-semiconductor (CMOS) pr...

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Detalles Bibliográficos
Autores principales: Deluca, Marco, Wimmer-Teubenbacher, Robert, Mitterhuber, Lisa, Mader, Johanna, Rohracher, Karl, Holzer, Marco, Köck, Anton
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386997/
https://www.ncbi.nlm.nih.gov/pubmed/30736393
http://dx.doi.org/10.3390/s19030672

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386997/
https://www.ncbi.nlm.nih.gov/pubmed/30736393
http://dx.doi.org/10.3390/s19030672

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