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In-Situ Temperature Measurement on CMOS Integrated Micro-Hotplates for Gas Sensing Devices

Metal oxide gas sensors generally need to be operated at elevated temperatures, up to and above 400 °C. Following the need for miniaturization of gas sensors and implementation into smart devices such as smartphones or wireless sensor nodes, recently complementary metal-oxide-semiconductor (CMOS) pr...

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Detalles Bibliográficos
Autores principales:	Deluca, Marco, Wimmer-Teubenbacher, Robert, Mitterhuber, Lisa, Mader, Johanna, Rohracher, Karl, Holzer, Marco, Köck, Anton
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6386997/ https://www.ncbi.nlm.nih.gov/pubmed/30736393 http://dx.doi.org/10.3390/s19030672

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