Cathode Design Optimization toward the Wide-Pressure-Range Miniature Discharge Ion Source for a Vacuum Micropump

It is difficult to generate and maintain the vacuum level in vacuum MEMS (Micro-Electro-Mechanical Systems) devices. Currently, there is still no single method or device capable of generating and maintaining the desired vacuum level in a vacuum device for a long time. This paper proposed a new wide-...

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Detalles Bibliográficos
Autores principales: Yao, Tongtong, Tang, Fei, Zhang, Jian, Wang, Xiaohao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387227/
https://www.ncbi.nlm.nih.gov/pubmed/30717216
http://dx.doi.org/10.3390/s19030624

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387227/
https://www.ncbi.nlm.nih.gov/pubmed/30717216
http://dx.doi.org/10.3390/s19030624

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