Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor

We present a simple, accurate open-circuit sensitivity model based on both analytically calculated lumped and empirically extracted lumped-parameters that enables a capacitive acoustic sensor to be efficiently characterized in the frequency domain at the wafer level. Our mixed model is mainly compos...

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Detalles Bibliográficos
Autores principales: Lee, Jaewoo, Im, Jong-Pil, Kim, Jeong-Hun, Lim, Sol-Yee, Moon, Seung-Eon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387240/
https://www.ncbi.nlm.nih.gov/pubmed/30691010
http://dx.doi.org/10.3390/s19030488

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387240/
https://www.ncbi.nlm.nih.gov/pubmed/30691010
http://dx.doi.org/10.3390/s19030488

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