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Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor

We present a simple, accurate open-circuit sensitivity model based on both analytically calculated lumped and empirically extracted lumped-parameters that enables a capacitive acoustic sensor to be efficiently characterized in the frequency domain at the wafer level. Our mixed model is mainly compos...

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Detalles Bibliográficos
Autores principales:	Lee, Jaewoo, Im, Jong-Pil, Kim, Jeong-Hun, Lim, Sol-Yee, Moon, Seung-Eon
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387240/ https://www.ncbi.nlm.nih.gov/pubmed/30691010 http://dx.doi.org/10.3390/s19030488

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