Novel Test Fixture for Characterizing MEMS Switch Microcontact Reliability and Performance

In microelectromechanical systems (MEMS) switches, the microcontact is crucial in determining reliability and performance. In the past, actual MEMS devices and atomic force microscopes (AFM)/scanning probe microscopes (SPM)/nanoindentation-based test fixtures have been used to collect relevant micro...

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Detalles Bibliográficos
Autores principales: Mahanta, Protap, Anwar, Farhana, Coutu, Ronald A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387283/
https://www.ncbi.nlm.nih.gov/pubmed/30704077
http://dx.doi.org/10.3390/s19030579

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387283/
https://www.ncbi.nlm.nih.gov/pubmed/30704077
http://dx.doi.org/10.3390/s19030579

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