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Novel Test Fixture for Characterizing MEMS Switch Microcontact Reliability and Performance
In microelectromechanical systems (MEMS) switches, the microcontact is crucial in determining reliability and performance. In the past, actual MEMS devices and atomic force microscopes (AFM)/scanning probe microscopes (SPM)/nanoindentation-based test fixtures have been used to collect relevant micro...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387283/ https://www.ncbi.nlm.nih.gov/pubmed/30704077 http://dx.doi.org/10.3390/s19030579 |