Single step fabrication of Silicon resistors on SOI substrate used as Thermistors

Temperature sensing is one of the important features of Micro Electro Mechanical Systems and a monolithic integration provides advantages for both fabrication simplicity and performance. The use of Silicon On Insulator substrates allows simple fabrication of integrated wires that can be used as ther...

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Detalles Bibliográficos
Autores principales: Rollo, Serena, Rani, Dipti, Olthuis, Wouter, Pascual García, César
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391396/
https://www.ncbi.nlm.nih.gov/pubmed/30808888
http://dx.doi.org/10.1038/s41598-019-38753-x

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391396/
https://www.ncbi.nlm.nih.gov/pubmed/30808888
http://dx.doi.org/10.1038/s41598-019-38753-x

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