Structural characterization of poly-Si Films crystallized by Ni Metal Induced Lateral Crystallization

The growth of the poly-Si films was studied by Transmission Electron Microscopy (TEM) after Ni Metal Induced Lateral Crystallization (Ni-MILC) of amorphous Si films at 413 °C. Significant differences in the morphology and the mode of growth of the films were observed, in comparison to films grown at...

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Detalles Bibliográficos
Autores principales: Vouroutzis, N., Stoemenos, J., Frangis, N., Radnóczi, G. Z., Knez, D., Hofer, F., Pécz, B.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391529/
https://www.ncbi.nlm.nih.gov/pubmed/30808923
http://dx.doi.org/10.1038/s41598-019-39503-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391529/
https://www.ncbi.nlm.nih.gov/pubmed/30808923
http://dx.doi.org/10.1038/s41598-019-39503-9

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