Comparison Between Performances of In(2)O(3) and In(2)TiO(5)-Based EIS Biosensors Using Post Plasma CF(4) Treatment Applied in Glucose and Urea Sensing

In this study, the effect of post-deposition tetrafluoromethane (CF(4)) plasma treatment on the physical and electrical characteristics of an In(2)TiO(5) based electrolyte-insulator-semiconductor (EIS) sensor was investigated. Post-deposition CF(4) plasma treatment typically improved the crystalline...

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Detalles Bibliográficos
Autores principales: Lin, Chun Fu, Kao, Chyuan Haur, Lin, Chan Yu, Liu, Chia Shao, Liu, Yi Wen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6395814/
https://www.ncbi.nlm.nih.gov/pubmed/30816160
http://dx.doi.org/10.1038/s41598-019-39012-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6395814/
https://www.ncbi.nlm.nih.gov/pubmed/30816160
http://dx.doi.org/10.1038/s41598-019-39012-9

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