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Comparison Between Performances of In(2)O(3) and In(2)TiO(5)-Based EIS Biosensors Using Post Plasma CF(4) Treatment Applied in Glucose and Urea Sensing
In this study, the effect of post-deposition tetrafluoromethane (CF(4)) plasma treatment on the physical and electrical characteristics of an In(2)TiO(5) based electrolyte-insulator-semiconductor (EIS) sensor was investigated. Post-deposition CF(4) plasma treatment typically improved the crystalline...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6395814/ https://www.ncbi.nlm.nih.gov/pubmed/30816160 http://dx.doi.org/10.1038/s41598-019-39012-9 |