Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

A structural characterization of W/Si multilayers using X-ray reflectivity (XRR), scanning transmission electron microscopy (STEM) and grazing-incidence small-angle X-ray scattering (GISAXS) is presented. STEM images revealed lateral, periodic density fluctuations in the Si layers, which were furthe...

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Detalles Bibliográficos
Autores principales: Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E., Bijkerk, F.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2019
Materias:
Research Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6396400/
https://www.ncbi.nlm.nih.gov/pubmed/30821267
http://dx.doi.org/10.1107/S2053273318017382

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6396400/
https://www.ncbi.nlm.nih.gov/pubmed/30821267
http://dx.doi.org/10.1107/S2053273318017382

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