Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering

Characterization of local order in thin films is challenging with pair distribution function (PDF) analysis because of the minute mass of the scattering material. Here, it is demonstrated that reliable high-energy grazing-incidence total X-ray scattering data can be obtained in situ during thin-film...

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Detalles Bibliográficos
Autores principales: Roelsgaard, Martin, Dippel, Ann-Christin, Borup, Kasper Andersen, Nielsen, Ida Gjerlevsen, Broge, Nils Lau Nyborg, Röh, Jan Torben, Gutowski, Olof, Iversen, Bo Brummerstedt
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2019
Materias:
Research Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6400190/
https://www.ncbi.nlm.nih.gov/pubmed/30867927
http://dx.doi.org/10.1107/S2052252519001192

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6400190/
https://www.ncbi.nlm.nih.gov/pubmed/30867927
http://dx.doi.org/10.1107/S2052252519001192

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