Spontaneous Parametric Down-Conversion Induced by Non-Degenerate Three-Wave Mixing in a Scanning MEMS Micro Mirror

Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS applications, the geometric structure is typically designed...

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Detalles Bibliográficos
Autores principales: Nabholz, Ulrike, Schatz, Frank, Mehner, Jan E., Degenfeld-Schonburg, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6408433/
https://www.ncbi.nlm.nih.gov/pubmed/30850710
http://dx.doi.org/10.1038/s41598-019-40377-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6408433/
https://www.ncbi.nlm.nih.gov/pubmed/30850710
http://dx.doi.org/10.1038/s41598-019-40377-0

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