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Spontaneous Parametric Down-Conversion Induced by Non-Degenerate Three-Wave Mixing in a Scanning MEMS Micro Mirror
Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS applications, the geometric structure is typically designed...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6408433/ https://www.ncbi.nlm.nih.gov/pubmed/30850710 http://dx.doi.org/10.1038/s41598-019-40377-0 |