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Flexible Mid-infrared Photonic Circuits for Real-time and Label-Free Hydroxyl Compound Detection
Chip-scale chemical detections were demonstrated by mid-Infrared (mid-IR) integrated optics made by aluminum nitride (AlN) waveguides on flexible borosilicate templates. The AlN film was deposited using sputtering at room temperature, and it exhibited a broad infrared transmittance up to λ = 9 µm. T...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6411863/ https://www.ncbi.nlm.nih.gov/pubmed/30858396 http://dx.doi.org/10.1038/s41598-019-39062-z |