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An Optical Diffuse Reflectance Model for the Characterization of a Si Wafer with an Evaporated SiO(2) Layer

Thin films are a type of coating that have a very wide spectrum of applications. They may be used as single layers or composed in multilayer stacks, which significantly extend their applications. One of the most commonly used material for thin films is silicon dioxide, SiO(2). Although there are oth...

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Detalles Bibliográficos
Autores principales: Zarzycki, Artur, Galeano, July, Bargiel, Sylwester, Andrieux, Aurore, Gorecki, Christophe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412209/
https://www.ncbi.nlm.nih.gov/pubmed/30795504
http://dx.doi.org/10.3390/s19040892