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An Optical Diffuse Reflectance Model for the Characterization of a Si Wafer with an Evaporated SiO(2) Layer
Thin films are a type of coating that have a very wide spectrum of applications. They may be used as single layers or composed in multilayer stacks, which significantly extend their applications. One of the most commonly used material for thin films is silicon dioxide, SiO(2). Although there are oth...
Autores principales: | Zarzycki, Artur, Galeano, July, Bargiel, Sylwester, Andrieux, Aurore, Gorecki, Christophe |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412209/ https://www.ncbi.nlm.nih.gov/pubmed/30795504 http://dx.doi.org/10.3390/s19040892 |
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