Luminescence from Si-Implanted SiO(2)-Si(3)N(4) Nano Bi-Layers for Electrophotonic Integrated Si Light Sources

In this paper, we present structural and luminescence studies of silicon-rich silicon oxide (SRO) and SRO-Si [Formula: see text] N [Formula: see text] bi-layers for integration in emitter-waveguide pairs that can be used for photonic lab-on-a-chip sensing applications. The results from bi and mono l...

Descripción completa

Detalles Bibliográficos
Autores principales: González-Fernández, Alfredo A., Juvert, Joan, Aceves-Mijares, Mariano, Domínguez, Carlos
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412257/
https://www.ncbi.nlm.nih.gov/pubmed/30791460
http://dx.doi.org/10.3390/s19040865

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412257/
https://www.ncbi.nlm.nih.gov/pubmed/30791460
http://dx.doi.org/10.3390/s19040865

Ejemplares similares