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Luminescence from Si-Implanted SiO(2)-Si(3)N(4) Nano Bi-Layers for Electrophotonic Integrated Si Light Sources

In this paper, we present structural and luminescence studies of silicon-rich silicon oxide (SRO) and SRO-Si [Formula: see text] N [Formula: see text] bi-layers for integration in emitter-waveguide pairs that can be used for photonic lab-on-a-chip sensing applications. The results from bi and mono l...

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Detalles Bibliográficos
Autores principales:	González-Fernández, Alfredo A., Juvert, Joan, Aceves-Mijares, Mariano, Domínguez, Carlos
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412257/ https://www.ncbi.nlm.nih.gov/pubmed/30791460 http://dx.doi.org/10.3390/s19040865

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