A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer

Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such...

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Detalles Bibliográficos
Autores principales: Venkatesh, Manjunath R., Sachdeva, Sumit, El Mansouri, Brahim, Wei, Jia, Bossche, Andre, Bosma, Duco, de Smet, Louis C. P. M., Sudhölter, Ernst J. R., Zhang, Guo Qi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412504/
https://www.ncbi.nlm.nih.gov/pubmed/30791657
http://dx.doi.org/10.3390/s19040888

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412504/
https://www.ncbi.nlm.nih.gov/pubmed/30791657
http://dx.doi.org/10.3390/s19040888

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